RF-MEMS, that is, microelectromechanical systems for radio frequency applications, have been reported in literature since more than one decade, highlighting their significant performance and characteristics, concerning basic passive components, such as variable capacitors (i.e., varactors) [1, 2], inductors [3, 4], and switches [5–8], and complex networks, such as phase shifters [9], impedance matching networks [10], and switching matrices [11–15]. Basic passive components in RF-MEMS technology present outstanding performance compared to their counterparts in standard semiconductor technology, such as high Q-factor, high linearity, low losses, and good isolation. By replacing standard passive components with their implementations in RF-MEMS technology within transceivers and circuits for telecommunication platforms, the performance of the whole systems can be boosted. Moreover, realizations of complex networks based on RF-MEMS components can replace entire subblocks of standard RF circuits (e.g., phase shifters, switching matrices, and so on), extending the reconfigurability and operability of the whole device, such as telecommunication platforms, satellites, and radar systems. Given these considerations, it is clear that RF-MEMS need to be properly modeled and simulated, as is typically done when dealing with standard semiconductor devices and circuits. However, MEMS technology, with its multiphysical nature that always implies the coupling of different physical domains with the mechanical properties of materials, makes the availability of proper simulation tools more difficult. Moreover, the integration of RF-MEMS devices with standard CMOS circuitry incorporated in the same system demands for the possibility of predicting the characteristics of a new hybrid RF-MEMS/CMOS block within a unique simulation environment. For all the above-mentioned reasons, an MEMS compact model library was developed by Iannacci et al. [16], implemented in the VerilogA© programming language [17], and used within the CadenceTM IC (Integrated Circuit) development framework, exploiting the Spectre© simulator machine.
Compact Modeling of RF MEMS devices
Iannacci, Jacopo
2013-01-01
Abstract
RF-MEMS, that is, microelectromechanical systems for radio frequency applications, have been reported in literature since more than one decade, highlighting their significant performance and characteristics, concerning basic passive components, such as variable capacitors (i.e., varactors) [1, 2], inductors [3, 4], and switches [5–8], and complex networks, such as phase shifters [9], impedance matching networks [10], and switching matrices [11–15]. Basic passive components in RF-MEMS technology present outstanding performance compared to their counterparts in standard semiconductor technology, such as high Q-factor, high linearity, low losses, and good isolation. By replacing standard passive components with their implementations in RF-MEMS technology within transceivers and circuits for telecommunication platforms, the performance of the whole systems can be boosted. Moreover, realizations of complex networks based on RF-MEMS components can replace entire subblocks of standard RF circuits (e.g., phase shifters, switching matrices, and so on), extending the reconfigurability and operability of the whole device, such as telecommunication platforms, satellites, and radar systems. Given these considerations, it is clear that RF-MEMS need to be properly modeled and simulated, as is typically done when dealing with standard semiconductor devices and circuits. However, MEMS technology, with its multiphysical nature that always implies the coupling of different physical domains with the mechanical properties of materials, makes the availability of proper simulation tools more difficult. Moreover, the integration of RF-MEMS devices with standard CMOS circuitry incorporated in the same system demands for the possibility of predicting the characteristics of a new hybrid RF-MEMS/CMOS block within a unique simulation environment. For all the above-mentioned reasons, an MEMS compact model library was developed by Iannacci et al. [16], implemented in the VerilogA© programming language [17], and used within the CadenceTM IC (Integrated Circuit) development framework, exploiting the Spectre© simulator machine.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
