This paper reports on the evolution of electromechanical properties of dielectric-less RF MEMS switches under long-term stress conditions. Two different designs, one based on a clamped-clamped air bridge and the other on a cantilever beam, are characterized and compared by monitoring pull-in and pull-out voltages after a long-time application of different bias voltages. Results show that the beam shape assumed after the snap-down may affect the lifetime of the switch.

Influence of beam geometry on the dielectric charging of RF MEMS switches

Solazzi, Francesco;Resta, Giuseppe;Mulloni, Viviana;Margesin, Benno;
2011

Abstract

This paper reports on the evolution of electromechanical properties of dielectric-less RF MEMS switches under long-term stress conditions. Two different designs, one based on a clamped-clamped air bridge and the other on a cantilever beam, are characterized and compared by monitoring pull-in and pull-out voltages after a long-time application of different bias voltages. Results show that the beam shape assumed after the snap-down may affect the lifetime of the switch.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11582/137201
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