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EnglishThis paper reports on the evolution of electromechanical properties of dielectric-less RF MEMS switches under long-term stress conditions. Two different designs, one based on a clamped-clamped air bridge and the other on a cantilever beam, are characterized and compared by monitoring pull-in and pull-out voltages after a long-time application of different bias voltages. Results show that the beam shape assumed after the snap-down may affect the lifetime of the switch.
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| Titolo: | Influence of beam geometry on the dielectric charging of RF MEMS switches |
| Autori: | |
| Data di pubblicazione: | 2011 |
| Abstract: | This paper reports on the evolution of electromechanical properties of dielectric-less RF MEMS switches under long-term stress conditions. Two different designs, one based on a clamped-clamped air bridge and the other on a cantilever beam, are characterized and compared by monitoring pull-in and pull-out voltages after a long-time application of different bias voltages. Results show that the beam shape assumed after the snap-down may affect the lifetime of the switch. |
| Handle: | http://hdl.handle.net/11582/137201 |
| Appare nelle tipologie: | 4.1 Contributo in Atti di convegno |
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