Influence of beam geometry on the dielectric charging of RF MEMS switches

This paper reports on the evolution of electromechanical properties of dielectric-less RF MEMS switches under long-term stress conditions. Two different designs, one based on a clamped-clamped air bridge and the other on a cantilever beam, are characterized and compared by monitoring pull-in and pull-out voltages after a long-time application of different bias voltages. Results show that the beam shape assumed after the snap-down may affect the lifetime of the switch.