In this paper we address the increasingly important and rapidly developing fied of ISFET-based silicon integrated biochemical sensors. ISFET transduction mechanism, modelling and electrochemical characterization techniques are reviewed. ISFET fabrication technology, mainly with reference to the ISFET-CMOS process developed at IRST, is described. Two examples of ISFET-based systems for application in the environmental monitoring field are presented.
Chemical Sensors based on ISFET Transducers
Lui, Alberto;Margesin, Benno;Zen, Mario;Soncini, Giovanni;
1996-01-01
Abstract
In this paper we address the increasingly important and rapidly developing fied of ISFET-based silicon integrated biochemical sensors. ISFET transduction mechanism, modelling and electrochemical characterization techniques are reviewed. ISFET fabrication technology, mainly with reference to the ISFET-CMOS process developed at IRST, is described. Two examples of ISFET-based systems for application in the environmental monitoring field are presented.File in questo prodotto:
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