Tunable LC networks are designed in RF-MEMS technology integrating ohmic MEMS switches, metalinsulator- metal (MIM) capacitors, MEMS binary varactors or capacitive switches, and suspended spiral inductors. The networks are intended for their use as LCtank of a complete radio-frequency voltage controlled oscillator (VCO), based on CMOS electronics, through chip-on-board assembly and wire-bonding. The realized LC-tanks prototypes are based on either an ohmic MEMS switch or a MEMS binary varactor, for the implementation of two alternative resonance frequencies. RF characterization results of the single LC-tank are presented for the fabricated prototypes. Resulting resonance frequencies of 1.3-3.6 GHz and Q-factors of 9- 14 for the ohmic switch based solution are confirmed by circuit simulation using post-fabrication process characterization data. 1.
RF-MEMS TUNABLE NETWORKS FOR VCO APPLICATIONS
Margesin, Benno;Giacomozzi, Flavio
2005-01-01
Abstract
Tunable LC networks are designed in RF-MEMS technology integrating ohmic MEMS switches, metalinsulator- metal (MIM) capacitors, MEMS binary varactors or capacitive switches, and suspended spiral inductors. The networks are intended for their use as LCtank of a complete radio-frequency voltage controlled oscillator (VCO), based on CMOS electronics, through chip-on-board assembly and wire-bonding. The realized LC-tanks prototypes are based on either an ohmic MEMS switch or a MEMS binary varactor, for the implementation of two alternative resonance frequencies. RF characterization results of the single LC-tank are presented for the fabricated prototypes. Resulting resonance frequencies of 1.3-3.6 GHz and Q-factors of 9- 14 for the ohmic switch based solution are confirmed by circuit simulation using post-fabrication process characterization data. 1.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
