By using a test structure especially designed for SEM cross sectioning analysis, it has been observed that the growing of Field Oxide in submicron opening is also affected by compressive mechanical stresses induced by the thermal oxide growth under the oxidation mask, i.e. at the bird’s break region. Experimental data show a new effect, i.e. a field oxide thicking phenomenon which developes at 0.7:-1.5 micron opening width. The thicking effect competes with the well known thinning effect and causes a shift on the appearance of the Field Oxide Thinning to narrower mask openings.
Thicking Effect in Dry/Wet Field Oxidation
Bellutti, Pierluigi;Zen, Mario;Soncini, Giovanni
1995-01-01
Abstract
By using a test structure especially designed for SEM cross sectioning analysis, it has been observed that the growing of Field Oxide in submicron opening is also affected by compressive mechanical stresses induced by the thermal oxide growth under the oxidation mask, i.e. at the bird’s break region. Experimental data show a new effect, i.e. a field oxide thicking phenomenon which developes at 0.7:-1.5 micron opening width. The thicking effect competes with the well known thinning effect and causes a shift on the appearance of the Field Oxide Thinning to narrower mask openings.File in questo prodotto:
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