RF MEMS are assuming a great importance in the fast evolving telecommunication market and space applications. In the last years a fexible technology platform has been developed and continuously optimized at FBK (Italy) for the fabrication of RF MEMS basic components as well as complex RF circuits working in the frequency range from sub-GHz up to more than 100 GHz. The paper reports about the fabrication process and its capabilities. The most important process features are described together with some modications required for the manufacturing of specic devices, like dielectric less RF MEMS switches. Examples of produced devices and their performances are briey presented.
A Flexible Fabrication Process for RF MEMS Devices
Giacomozzi, Flavio;Mulloni, Viviana;Colpo, Sabrina;Iannacci, Jacopo;Margesin, Benno;Faes, Alessandro
2011-01-01
Abstract
RF MEMS are assuming a great importance in the fast evolving telecommunication market and space applications. In the last years a fexible technology platform has been developed and continuously optimized at FBK (Italy) for the fabrication of RF MEMS basic components as well as complex RF circuits working in the frequency range from sub-GHz up to more than 100 GHz. The paper reports about the fabrication process and its capabilities. The most important process features are described together with some modications required for the manufacturing of specic devices, like dielectric less RF MEMS switches. Examples of produced devices and their performances are briey presented.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
