This paper presents the development of three different 5-bit K-band MEMS phase shifters monolithically integrated on high resistivity silicon substrate. The devices are based on similar architectures (combination of switched line and loaded line) but they employ different MEMS switch designs (cantilevers & air-bridges, ohmic & capacitive) and RF junctions (SP2T & SP4T). The different designs have been developed aiming at high RF properties as well as high yield and improved reliability. The performance of the different devices has been then analyzed to identify the best configuration to be implemented in electronic beam scanning phased arrays. Very high performances were measured for the three devices, showing an average insertion loss of 3.5dB for the clamped-clamped SP2T-based design, 2.2 dB for the cantilever SP2T-based device and 2.1 dB for the cantilever SP4T-based design. The measurements of the packaged devices are on-going at Selex-Comms.

Design and manufacturing of different K-band integrated MEMS phase shifters for electronic beam scanning antennas

Margesin, Benno;Colpo, Sabrina;
2009-01-01

Abstract

This paper presents the development of three different 5-bit K-band MEMS phase shifters monolithically integrated on high resistivity silicon substrate. The devices are based on similar architectures (combination of switched line and loaded line) but they employ different MEMS switch designs (cantilevers & air-bridges, ohmic & capacitive) and RF junctions (SP2T & SP4T). The different designs have been developed aiming at high RF properties as well as high yield and improved reliability. The performance of the different devices has been then analyzed to identify the best configuration to be implemented in electronic beam scanning phased arrays. Very high performances were measured for the three devices, showing an average insertion loss of 3.5dB for the clamped-clamped SP2T-based design, 2.2 dB for the cantilever SP2T-based device and 2.1 dB for the cantilever SP4T-based design. The measurements of the packaged devices are on-going at Selex-Comms.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11582/6410
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