In this paper we present a continuously tunable phase shifter realized in MEMS technology. Varactors with liquid crystals as a tunable dielectric layer underneath gold bridges are utilized to build a loaded line phase shifter. Measurements show that the phase shifter has a differential phase shift of 92°, a figure of merit (FoM) of 42 °/dB and an input matching of -19 dB at 76 GHz. The realized phase shifter can be used in combination with MEMS switches in order to build a 360° tunable reflection phase shifter.
Continuously Tunable W-Band Phase Shifter based on Liquid Crystals and MEMS Technology
Giacomozzi, Flavio;Colpo, Sabrina;
2011-01-01
Abstract
In this paper we present a continuously tunable phase shifter realized in MEMS technology. Varactors with liquid crystals as a tunable dielectric layer underneath gold bridges are utilized to build a loaded line phase shifter. Measurements show that the phase shifter has a differential phase shift of 92°, a figure of merit (FoM) of 42 °/dB and an input matching of -19 dB at 76 GHz. The realized phase shifter can be used in combination with MEMS switches in order to build a 360° tunable reflection phase shifter.File in questo prodotto:
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