New configurations of double slot CPW feed micromachined antennas arrays were realized on a 1.5um thin three-layer dielectric membrane fabricated on Si and GaAs substrates. The antennas were designed for 38 GHz operating frequency
Design, Manufacturing and Characterization of membrane supported Antennas for 38 GHz Wireless Applications
Giacomozzi, Flavio;
2001-01-01
Abstract
New configurations of double slot CPW feed micromachined antennas arrays were realized on a 1.5um thin three-layer dielectric membrane fabricated on Si and GaAs substrates. The antennas were designed for 38 GHz operating frequencyFile in questo prodotto:
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