In this paper, the design of a capacitive RF-MEMS switch is presented. In order to have precise control of the downstate capacitance value a floating metal technique is used. As RF MEMS switches represents new design challenges, electrical modelling is addressed with 2.5D and 3D full wave electromagnetic software. More specifically, ADS-momentum (2.5D) and EMDS (3D) from Agilent Technologies are used. The switch was fabricated at FBK-IRST foundry in Trento, Italy. Characterization and simulation results are compared and conclusions are extracted. The designed capacitive switch presents a maximum isolation of 38 dB at 15 Ghz
Diseño de dispositivos micro-conmutadores RF-MEMS capacitivos con metalizacion flotante
Giacomozzi, Flavio;
2008-01-01
Abstract
In this paper, the design of a capacitive RF-MEMS switch is presented. In order to have precise control of the downstate capacitance value a floating metal technique is used. As RF MEMS switches represents new design challenges, electrical modelling is addressed with 2.5D and 3D full wave electromagnetic software. More specifically, ADS-momentum (2.5D) and EMDS (3D) from Agilent Technologies are used. The switch was fabricated at FBK-IRST foundry in Trento, Italy. Characterization and simulation results are compared and conclusions are extracted. The designed capacitive switch presents a maximum isolation of 38 dB at 15 GhzFile in questo prodotto:
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