The effect of electron irradiation on hydrogenated amorphous carbon (a-C :H) films is investigated on both as-deposited and thermally annealed films and is compared to the effect of thermal annealing. As for the as-deposited film, both electron irradiation and thermal annealing result in a change in the film structure from diamond-like to graphite-like. In the case of electron irradiation, such a phase transformation proceeds in a logarithmic way as a function of the electron dose. No electron-induced effect is observed on previously annealed films
Electron beam irradiation of hydrogenated amorphous carbon films
Calliari, Lucia;Filippi, Massimiliano;Bensaada Laidani, Nadhira
2004-01-01
Abstract
The effect of electron irradiation on hydrogenated amorphous carbon (a-C :H) films is investigated on both as-deposited and thermally annealed films and is compared to the effect of thermal annealing. As for the as-deposited film, both electron irradiation and thermal annealing result in a change in the film structure from diamond-like to graphite-like. In the case of electron irradiation, such a phase transformation proceeds in a logarithmic way as a function of the electron dose. No electron-induced effect is observed on previously annealed filmsFile in questo prodotto:
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