Thermo ionic Vacuum Arc plasma (TVA) was employed to synthesize H-free DLC films containing nanocrystalline grains embedded in an amorphous structure, at high deposition rates of 1.5 μm/h. We have previously demonstrated that the grains observed in the film are diamond crystallites. The results presented in the current paper show a direct correlation of the size of the grains with distance from the anode. It was found that larger grains of the order of 100-200 nm but fewer are formed closer to the anode, whereas very smooth films with 1-2 nm roughness were obtained at 30 cm away from the anode. The control of DLC film nanoscale roughness opens the way for the fabrication of diamond devices and nano-abrasives.
Diamond film nano-abrasives obtained by anodic arc
Micheli, Victor;Calliari, Lucia;
2009-01-01
Abstract
Thermo ionic Vacuum Arc plasma (TVA) was employed to synthesize H-free DLC films containing nanocrystalline grains embedded in an amorphous structure, at high deposition rates of 1.5 μm/h. We have previously demonstrated that the grains observed in the film are diamond crystallites. The results presented in the current paper show a direct correlation of the size of the grains with distance from the anode. It was found that larger grains of the order of 100-200 nm but fewer are formed closer to the anode, whereas very smooth films with 1-2 nm roughness were obtained at 30 cm away from the anode. The control of DLC film nanoscale roughness opens the way for the fabrication of diamond devices and nano-abrasives.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
