In this Abstract, we review the results obtained during last several years by a research group working at the Russian Research Center Kurchatov Institute. Our activity could be classified into four main directions. The first is the investigation of materials and physical chemistry of metal-oxide gas sensors made using thick film technology. The main aim of this activity is the fabrication of most stable at high temperature, typical for operation of this kind of sensors (up to 6000C) materials and sensing layers. On the base of these materials, we designed gas sensors with lowest power consumption available for this type of devises. The second field of our interests is the application of combination of thick film materials and deposition technology with sensor chip made by micromachining technology, This provides a possibility to use the advantages of both technologies for optimization of sensor parameters. The third area of our interests concerns the investigation of a new type of gas sensors based on application of Metal-Solid electrolyte-Semiconductor (MSS) structures. These devices were applied for the determination of low concentrations of toxic gases such as fluorine and hydrogen fluoride. The forth field of our interests is the application of gas sensors in non-traditional areas such as fire protection systems, monitoring of pollutions in specific area of radio-chemical industry, in nuclear power reactors, etc.
Semiconductor Gas Sensors for Detection of Combustible and Toxic Gases
Zen, Mario
1999-01-01
Abstract
In this Abstract, we review the results obtained during last several years by a research group working at the Russian Research Center Kurchatov Institute. Our activity could be classified into four main directions. The first is the investigation of materials and physical chemistry of metal-oxide gas sensors made using thick film technology. The main aim of this activity is the fabrication of most stable at high temperature, typical for operation of this kind of sensors (up to 6000C) materials and sensing layers. On the base of these materials, we designed gas sensors with lowest power consumption available for this type of devises. The second field of our interests is the application of combination of thick film materials and deposition technology with sensor chip made by micromachining technology, This provides a possibility to use the advantages of both technologies for optimization of sensor parameters. The third area of our interests concerns the investigation of a new type of gas sensors based on application of Metal-Solid electrolyte-Semiconductor (MSS) structures. These devices were applied for the determination of low concentrations of toxic gases such as fluorine and hydrogen fluoride. The forth field of our interests is the application of gas sensors in non-traditional areas such as fire protection systems, monitoring of pollutions in specific area of radio-chemical industry, in nuclear power reactors, etc.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
