DESIGN AND FABRICATION OF A KELVIN PROBE-BASED MEMS HYDROGEN SENSOR

Innovative hydrogen sensors based on Kelvin Probe operation principle and on MEMS technology have been designed and fabricated, on the basis of a previous study and process dedicated to the manufacture of electro-statically actuated RF MEMS capacitive switches. Many factors can influence the work function difference, including adsorption or desorption of volatile compound molecules depending on the sample material. The innivation proposed consists in a mobile Au plate, as a gas chemical sensor to monitor the concentration of hydrogen over time with very high accuracy by detecting changes in the work function difference balance condition.