We report on some preliminary results on double-sided AC-coupled microstrip detectors fabricated at IRST. The technological approach is described and the results from the experimental characterization of both detector and test structures are presented, showing good electrical characteristics as well as a low process-related defectivity.
First results on double-sided AC-coupled Si strip detectors
Boscardin, Maurizio;Dalla Betta, Gian Franco;Ferrario, Lorenza;Zen, Mario;Zorzi, Nicola
1998-01-01
Abstract
We report on some preliminary results on double-sided AC-coupled microstrip detectors fabricated at IRST. The technological approach is described and the results from the experimental characterization of both detector and test structures are presented, showing good electrical characteristics as well as a low process-related defectivity.File in questo prodotto:
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