Sfoglia per Autore
Topography developed by sputtering in a magnetic sector instruments: an AFM and SEM study’
2003-01-01 Iacob, Erica; Bersani, Massimo; Lui, Alberto; Giubertoni, Damiano; Barozzi, Mario; Anderle, Mariano
ToF-SIMS study of adhesive residuals on device contact pads after wafer taping and backgrinding
2003-01-01 Lazzeri, Paolo; G., Franco; M., Garozzo; C., Gerardi; Iacob, Erica; Faro A., Lo; A., Privitera; Vanzetti, Lia Emanuela; Bersani, Massimo
Growth of titanium dioxide films by cluster supersonic beams for VOC sensing applications
2003-01-01 Tullio, Toccoli; S., Capone; Luca, Guerini; Anderle, Mariano; Andrea, Boschetti; Iacob, Erica; Micheli, Victor; P., Siciliano; Salvatore, Iannotta
Nanostructures by assembling clusters and molecules from supersonic beams: A novel approach for gas sensing devices
2003-01-01 Toccoli, Tullio; Pallaoro, Alessia; Coppedè, Nicola; Iannotta, Salvatore; E., Barborini; P., Milani; A. M., Taurino; P., Siciliano; Iacob, Erica; Anderle, Mariano
D-SIMS and ToF-SIMS quantitative depth profiles comparison on ultra thin oxynitrides
2003-01-01 Bersani, Massimo; Giubertoni, Damiano; Barozzi, Mario; Iacob, Erica; Vanzetti, Lia Emanuela; Anderle, Mariano; Lazzeri, Paolo; B., Crivelli; F., Zanderigo
Material characterization and the formation of nanoporous PMSSQ low-k dielectrics
2003-01-01 Lazzeri, Paolo; Vanzetti, Lia Emanuela; Iacob, Erica; Bersani, Massimo; Anderle, Mariano; J. J., Park; Z. Lin R. M., Briber; G. W., Rubloff; R. D., Miller
Material Characterization and the Formation of Nanoporous PMSSQ Low-K Dielectrics
2003-01-01 Lazzeri, Paolo; Vanzetti, Lia Emanuela; Iacob, Erica; Bersani, Massimo; Anderle, Mariano; Jung Jin, Park; Z., Lin; R. M., Briber; Gary Wayne, Rubloff; D. R., Miller
Morphology structure and interfaces in the preparation of films by SUMBE for gas sensing
2003-01-01 Iacob, Erica; Anderle, Mariano; Bersani, Massimo; Coppedè, Nicola; Lazzeri, Paolo; Micheli, Victor; Pallaoro, Alessia; Toccoli, Tullio; Iannotta, Salvatore
Rotating stage and shallow depth profiling on Cameca SC-Ultra apparatus
2004-01-01 S., Pederzoli; Barozzi, Mario; Iacob, Erica; Giubertoni, Damiano; Bersani, Massimo
Induced roughness during SIMS analysis by low energy Cs+ beam
2004-01-01 Iacob, Erica; Giubertoni, Damiano; Barozzi, Mario; S., Pederzoli; Bersani, Massimo
SIMS analytical conditions optimized to reduce the morphology induced by sputtering with an oblique O2+ beam
2004-01-01 Barozzi, Mario; Giubertoni, Damiano; S., Pederzoli; Iacob, Erica; Bersani, Massimo
Ultra thin oxynitride profiles by XPS etch-back analyses
2004-01-01 Vanzetti, Lia Emanuela; Iacob, Erica; Barozzi, Mario; Giubertoni, Damiano; Bersani, Massimo; Anderle, Mariano; P., Bacciaglia; B., Crivelli; M. L., Polignano; M. E., Vitali
Topography induced by sputtering in a magnetic sector instrument: an AFM and SEM study
2004-01-01 Iacob, Erica; Bersani, Massimo; A., Lui; Giubertoni, Damiano; Barozzi, Mario; Anderle, Mariano
Induced roughness by low energy ion bombardment
2004-01-01 Iacob, Erica; Giubertoni, Damiano; Barozzi, Mario; S., Pederzoli; Bersani, Massimo; Anderle, Mariano
Study of nanoscale structures induced by low energy ion beam
2004-01-01 Iacob, Erica; Giubertoni, Damiano; Barozzi, Mario; S., Pederzoli; Bersani, Massimo
Chemical and morphological characterization of nanoporous silica low-k dielectrics etched in fluorocarbon plasmas
2004-01-01 Lazzeri, Paolo; Anderle, Mariano; X., Hua; Iacob, Erica; C. K., Inoki; P., Jiang; T. S., Kuan; G. S., Oehrlein
Porosity- induced effects during C4F8/90% Ar plasma etching of silica-based ultralow-k dielectrics
2005-01-01 Lazzeri, Paolo; X., Hua; G. S., Oehrlein; Barozzi, Mario; Iacob, Erica; Anderle, Mariano
ToF-SIMS and AFM studies of low-k dielectric etching in fluorocarbon plasmas
2005-01-01 Lazzeri, Paolo; X., Hua; G., Oehrlein; Iacob, Erica; Barozzi, Mario; Bersani, Massimo; Anderle, Mariano
Activated dopant effect on low energy SIMS depth profiling
2005-01-01 Barozzi, Mario; Giubertoni, Damiano; S., Pederzoli; Anderle, Mariano; Iacob, Erica; Bersani, Massimo
Surface investigation of archeological glasses by secondary ion mass spectrometry
2005-01-01 S., Pederzoli; Vanzetti, Lia Emanuela; Iacob, Erica; Giubertoni, Damiano; Barozzi, Mario; Lazzeri, Paolo; Bersani, Massimo; Anderle, Mariano; G., Giunta; E., di Paola
Titolo | Data di pubblicazione | Autore(i) | File |
---|---|---|---|
Topography developed by sputtering in a magnetic sector instruments: an AFM and SEM study’ | 1-gen-2003 | Iacob, Erica; Bersani, Massimo; Lui, Alberto; Giubertoni, Damiano; Barozzi, Mario; Anderle, Mariano | |
ToF-SIMS study of adhesive residuals on device contact pads after wafer taping and backgrinding | 1-gen-2003 | Lazzeri, Paolo; G., Franco; M., Garozzo; C., Gerardi; Iacob, Erica; Faro A., Lo; A., Privitera; Vanzetti, Lia Emanuela; Bersani, Massimo | |
Growth of titanium dioxide films by cluster supersonic beams for VOC sensing applications | 1-gen-2003 | Tullio, Toccoli; S., Capone; Luca, Guerini; Anderle, Mariano; Andrea, Boschetti; Iacob, Erica; Micheli, Victor; P., Siciliano; Salvatore, Iannotta | |
Nanostructures by assembling clusters and molecules from supersonic beams: A novel approach for gas sensing devices | 1-gen-2003 | Toccoli, Tullio; Pallaoro, Alessia; Coppedè, Nicola; Iannotta, Salvatore; E., Barborini; P., Milani; A. M., Taurino; P., Siciliano; Iacob, Erica; Anderle, Mariano | |
D-SIMS and ToF-SIMS quantitative depth profiles comparison on ultra thin oxynitrides | 1-gen-2003 | Bersani, Massimo; Giubertoni, Damiano; Barozzi, Mario; Iacob, Erica; Vanzetti, Lia Emanuela; Anderle, Mariano; Lazzeri, Paolo; B., Crivelli; F., Zanderigo | |
Material characterization and the formation of nanoporous PMSSQ low-k dielectrics | 1-gen-2003 | Lazzeri, Paolo; Vanzetti, Lia Emanuela; Iacob, Erica; Bersani, Massimo; Anderle, Mariano; J. J., Park; Z. Lin R. M., Briber; G. W., Rubloff; R. D., Miller | |
Material Characterization and the Formation of Nanoporous PMSSQ Low-K Dielectrics | 1-gen-2003 | Lazzeri, Paolo; Vanzetti, Lia Emanuela; Iacob, Erica; Bersani, Massimo; Anderle, Mariano; Jung Jin, Park; Z., Lin; R. M., Briber; Gary Wayne, Rubloff; D. R., Miller | |
Morphology structure and interfaces in the preparation of films by SUMBE for gas sensing | 1-gen-2003 | Iacob, Erica; Anderle, Mariano; Bersani, Massimo; Coppedè, Nicola; Lazzeri, Paolo; Micheli, Victor; Pallaoro, Alessia; Toccoli, Tullio; Iannotta, Salvatore | |
Rotating stage and shallow depth profiling on Cameca SC-Ultra apparatus | 1-gen-2004 | S., Pederzoli; Barozzi, Mario; Iacob, Erica; Giubertoni, Damiano; Bersani, Massimo | |
Induced roughness during SIMS analysis by low energy Cs+ beam | 1-gen-2004 | Iacob, Erica; Giubertoni, Damiano; Barozzi, Mario; S., Pederzoli; Bersani, Massimo | |
SIMS analytical conditions optimized to reduce the morphology induced by sputtering with an oblique O2+ beam | 1-gen-2004 | Barozzi, Mario; Giubertoni, Damiano; S., Pederzoli; Iacob, Erica; Bersani, Massimo | |
Ultra thin oxynitride profiles by XPS etch-back analyses | 1-gen-2004 | Vanzetti, Lia Emanuela; Iacob, Erica; Barozzi, Mario; Giubertoni, Damiano; Bersani, Massimo; Anderle, Mariano; P., Bacciaglia; B., Crivelli; M. L., Polignano; M. E., Vitali | |
Topography induced by sputtering in a magnetic sector instrument: an AFM and SEM study | 1-gen-2004 | Iacob, Erica; Bersani, Massimo; A., Lui; Giubertoni, Damiano; Barozzi, Mario; Anderle, Mariano | |
Induced roughness by low energy ion bombardment | 1-gen-2004 | Iacob, Erica; Giubertoni, Damiano; Barozzi, Mario; S., Pederzoli; Bersani, Massimo; Anderle, Mariano | |
Study of nanoscale structures induced by low energy ion beam | 1-gen-2004 | Iacob, Erica; Giubertoni, Damiano; Barozzi, Mario; S., Pederzoli; Bersani, Massimo | |
Chemical and morphological characterization of nanoporous silica low-k dielectrics etched in fluorocarbon plasmas | 1-gen-2004 | Lazzeri, Paolo; Anderle, Mariano; X., Hua; Iacob, Erica; C. K., Inoki; P., Jiang; T. S., Kuan; G. S., Oehrlein | |
Porosity- induced effects during C4F8/90% Ar plasma etching of silica-based ultralow-k dielectrics | 1-gen-2005 | Lazzeri, Paolo; X., Hua; G. S., Oehrlein; Barozzi, Mario; Iacob, Erica; Anderle, Mariano | |
ToF-SIMS and AFM studies of low-k dielectric etching in fluorocarbon plasmas | 1-gen-2005 | Lazzeri, Paolo; X., Hua; G., Oehrlein; Iacob, Erica; Barozzi, Mario; Bersani, Massimo; Anderle, Mariano | |
Activated dopant effect on low energy SIMS depth profiling | 1-gen-2005 | Barozzi, Mario; Giubertoni, Damiano; S., Pederzoli; Anderle, Mariano; Iacob, Erica; Bersani, Massimo | |
Surface investigation of archeological glasses by secondary ion mass spectrometry | 1-gen-2005 | S., Pederzoli; Vanzetti, Lia Emanuela; Iacob, Erica; Giubertoni, Damiano; Barozzi, Mario; Lazzeri, Paolo; Bersani, Massimo; Anderle, Mariano; G., Giunta; E., di Paola |
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