Sfoglia per Autore
Influence of changes in the resistivity of the sample surface on ultra-shallow SIMS profiles for arsenic
2006-01-01 Barozzi, Mario; Giubertoni, Damiano; S., Pederzoli; Anderle, Mariano; Iacob, Erica; Bersani, Massimo
Comparison between the SIMS and MEIS techniques for the characterization of ultra shallow arsenic implants
2006-01-01 Giubertoni, Damiano; Bersani, Massimo; Barozzi, Mario; S., Pederzoli; Iacob, Erica; J., van den Berg; M., Werner
Junction Stability of B Doped Layers in SOI Formed with Optimized Vacancy Engineering Implants
2006-01-01 A. J., Smith; N. E. B., Cowern; B., Colombeau; R., Gwilliam; B. J., Sealy; E. J. H., Collart; Gennaro, Salvatore; Giubertoni, Damiano; Bersani, Massimo; Barozzi, Mario
Analytical methodology development for SRO chemical physical characterization
2006-01-01 Barozzi, Mario; Iacob, Erica; Vanzetti, Lia Emanuela; Bersani, Massimo; Pucker, Georg; C., Kompocholis
Correlation between silicon-nitride film stress and composition: XPS and SIMS analyses
2006-01-01 Vanzetti, Lia Emanuela; Barozzi, Mario; Giubertoni, Damiano; C., Kompocholis; Bagolini, Alvise; Bellutti, Pierluigi
Depth profile investigations of silicon nanocrystals formed in sapphire by ion implantation
2007-01-01 Selcuk, Yerci; I., Yildiz; M., Kulacki; U., Serincan; Barozzi, Mario; Bersani, Massimo
Multilayer silicon rich oxy-nitride films characterization by SIMS, VASE and AFM
2007-01-01 Barozzi, Mario; Vanzetti, Lia Emanuela; Iacob, Erica; Bersani, Massimo; Anderle, Mariano; Pucker, Georg; C., Kompocholis; Ghulinyan, Mher; Bellutti, Pierluigi
Analytical methodology development for Silicon rich oxide chemical physical characterization
2007-01-01 Barozzi, Mario; Iacob, Erica; Vanzetti, Lia Emanuela; Bersani, Massimo; Anderle, Mariano; Pucker, Georg; Kompocholis, Constantine
Analytical Methodology Development for Silicon-rich-oxide Chemical and Physical Characterization
2007-01-01 Barozzi, Mario; Iacob, Erica; Vanzetti, Lia Emanuela; Bersani, Massimo; Anderle, Mariano; Pucker, Georg; C., Kompocholis
Combined XPS, SIMS and AFM analysis of silicon nano-crystals embedded in silicon oxide layers
2007-01-01 Vanzetti, Lia Emanuela; Barozzi, Mario; Iacob, Erica; Bersani, Massimo; Pucker, Georg; Bellutti, Pierluigi
Multilayer silicon rich oxy-nitride films characterization by SIMS, VASE and AFM
2008-01-01 Barozzi, Mario; Vanzetti, Lia Emanuela; Iacob, Erica; Bersani, Massimo; A., Anderle; Pucker, Georg; Constantine, Kompocholis; Ghulinyan, Mher; Bellutti, Pierluigi
Phase separation and layer mixing in SiO2/SiOx superlattices
2008-01-01 Pucker, Georg; Ghulinyan, Mher; Barozzi, Mario; Vanzetti, Lia Emanuela; Picciotto, Antonino; M., Wang; Bersani, Massimo
Secondary ion mass spectrometry analysis applications on semiconductor materials
2008-01-01 Bersani, Massimo; Giubertoni, Damiano; Gennaro, Salvatore; Barozzi, Mario; Canteri, Roberto; Vanzetti, Lia Emanuela; Pepponi, Giancarlo; Anderle, Mariano
Combined XPS, SIMS and AFM analysis of silicon nanocrystals embedded in silicon oxide layers
2008-01-01 Vanzetti, Lia Emanuela; Barozzi, Mario; Iacob, Erica; Bersani, Massimo; Pucker, Georg; Bellutti, Pierluigi
Structural analyses of thermal annealed SRO/SiO2 superlattices
2010-01-01 Vanzetti, Lia Emanuela; Pucker, Georg; S., Milita; Barozzi, Mario; Ghulinyan, Mher; Bersani, Massimo
Visita ispettiva annuale di sorveglianza Accredia
2010-01-01 Iacob, Erica; Bersani, Massimo; Giubertoni, Damiano; Barozzi, Mario; Vanzetti, Lia Emanuela
TiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFM
2011-01-01 Barozzi, Mario; Iacob, Erica; Jaap Van Den, Berg; Mike, Reading; Christoph, Adelmann; Hilde, Tielens; Bersani, Massimo; Mihaela, Popovici
Characterisation of ultra-shallow disorder profiles and dielectric functions in ion implanted Si
2011-01-01 I., Mohacsi; P., Petrik; M., Fried; T., Lohner; J. A., van den Berg; M. A., Reading; Giubertoni, Damiano; Barozzi, Mario; A., Parisini
High performance n+/p and p+/n germanium diodes at low-temperature activation annealing
2011-01-01 V., Ioannou Sougleridis; S. F., Galata; E., Golias; T., Speliotis; A., Dimoulas; Giubertoni, Damiano; Gennaro, Salvatore; Barozzi, Mario
Development of nano-roughness under SIMS ion sputtering of Germanium surfaces
2011-01-01 Iacob, Erica; Barozzi, Mario; Demenev, Evgeny; Gennaro, Salvatore; Giubertoni, Damiano; Bersani, Massimo
Titolo | Data di pubblicazione | Autore(i) | File |
---|---|---|---|
Influence of changes in the resistivity of the sample surface on ultra-shallow SIMS profiles for arsenic | 1-gen-2006 | Barozzi, Mario; Giubertoni, Damiano; S., Pederzoli; Anderle, Mariano; Iacob, Erica; Bersani, Massimo | |
Comparison between the SIMS and MEIS techniques for the characterization of ultra shallow arsenic implants | 1-gen-2006 | Giubertoni, Damiano; Bersani, Massimo; Barozzi, Mario; S., Pederzoli; Iacob, Erica; J., van den Berg; M., Werner | |
Junction Stability of B Doped Layers in SOI Formed with Optimized Vacancy Engineering Implants | 1-gen-2006 | A. J., Smith; N. E. B., Cowern; B., Colombeau; R., Gwilliam; B. J., Sealy; E. J. H., Collart; Gennaro, Salvatore; Giubertoni, Damiano; Bersani, Massimo; Barozzi, Mario | |
Analytical methodology development for SRO chemical physical characterization | 1-gen-2006 | Barozzi, Mario; Iacob, Erica; Vanzetti, Lia Emanuela; Bersani, Massimo; Pucker, Georg; C., Kompocholis | |
Correlation between silicon-nitride film stress and composition: XPS and SIMS analyses | 1-gen-2006 | Vanzetti, Lia Emanuela; Barozzi, Mario; Giubertoni, Damiano; C., Kompocholis; Bagolini, Alvise; Bellutti, Pierluigi | |
Depth profile investigations of silicon nanocrystals formed in sapphire by ion implantation | 1-gen-2007 | Selcuk, Yerci; I., Yildiz; M., Kulacki; U., Serincan; Barozzi, Mario; Bersani, Massimo | |
Multilayer silicon rich oxy-nitride films characterization by SIMS, VASE and AFM | 1-gen-2007 | Barozzi, Mario; Vanzetti, Lia Emanuela; Iacob, Erica; Bersani, Massimo; Anderle, Mariano; Pucker, Georg; C., Kompocholis; Ghulinyan, Mher; Bellutti, Pierluigi | |
Analytical methodology development for Silicon rich oxide chemical physical characterization | 1-gen-2007 | Barozzi, Mario; Iacob, Erica; Vanzetti, Lia Emanuela; Bersani, Massimo; Anderle, Mariano; Pucker, Georg; Kompocholis, Constantine | |
Analytical Methodology Development for Silicon-rich-oxide Chemical and Physical Characterization | 1-gen-2007 | Barozzi, Mario; Iacob, Erica; Vanzetti, Lia Emanuela; Bersani, Massimo; Anderle, Mariano; Pucker, Georg; C., Kompocholis | |
Combined XPS, SIMS and AFM analysis of silicon nano-crystals embedded in silicon oxide layers | 1-gen-2007 | Vanzetti, Lia Emanuela; Barozzi, Mario; Iacob, Erica; Bersani, Massimo; Pucker, Georg; Bellutti, Pierluigi | |
Multilayer silicon rich oxy-nitride films characterization by SIMS, VASE and AFM | 1-gen-2008 | Barozzi, Mario; Vanzetti, Lia Emanuela; Iacob, Erica; Bersani, Massimo; A., Anderle; Pucker, Georg; Constantine, Kompocholis; Ghulinyan, Mher; Bellutti, Pierluigi | |
Phase separation and layer mixing in SiO2/SiOx superlattices | 1-gen-2008 | Pucker, Georg; Ghulinyan, Mher; Barozzi, Mario; Vanzetti, Lia Emanuela; Picciotto, Antonino; M., Wang; Bersani, Massimo | |
Secondary ion mass spectrometry analysis applications on semiconductor materials | 1-gen-2008 | Bersani, Massimo; Giubertoni, Damiano; Gennaro, Salvatore; Barozzi, Mario; Canteri, Roberto; Vanzetti, Lia Emanuela; Pepponi, Giancarlo; Anderle, Mariano | |
Combined XPS, SIMS and AFM analysis of silicon nanocrystals embedded in silicon oxide layers | 1-gen-2008 | Vanzetti, Lia Emanuela; Barozzi, Mario; Iacob, Erica; Bersani, Massimo; Pucker, Georg; Bellutti, Pierluigi | |
Structural analyses of thermal annealed SRO/SiO2 superlattices | 1-gen-2010 | Vanzetti, Lia Emanuela; Pucker, Georg; S., Milita; Barozzi, Mario; Ghulinyan, Mher; Bersani, Massimo | |
Visita ispettiva annuale di sorveglianza Accredia | 1-gen-2010 | Iacob, Erica; Bersani, Massimo; Giubertoni, Damiano; Barozzi, Mario; Vanzetti, Lia Emanuela | |
TiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFM | 1-gen-2011 | Barozzi, Mario; Iacob, Erica; Jaap Van Den, Berg; Mike, Reading; Christoph, Adelmann; Hilde, Tielens; Bersani, Massimo; Mihaela, Popovici | |
Characterisation of ultra-shallow disorder profiles and dielectric functions in ion implanted Si | 1-gen-2011 | I., Mohacsi; P., Petrik; M., Fried; T., Lohner; J. A., van den Berg; M. A., Reading; Giubertoni, Damiano; Barozzi, Mario; A., Parisini | |
High performance n+/p and p+/n germanium diodes at low-temperature activation annealing | 1-gen-2011 | V., Ioannou Sougleridis; S. F., Galata; E., Golias; T., Speliotis; A., Dimoulas; Giubertoni, Damiano; Gennaro, Salvatore; Barozzi, Mario | |
Development of nano-roughness under SIMS ion sputtering of Germanium surfaces | 1-gen-2011 | Iacob, Erica; Barozzi, Mario; Demenev, Evgeny; Gennaro, Salvatore; Giubertoni, Damiano; Bersani, Massimo |
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