Sfoglia per Autore
Quantitative depth profiling of boron and arsenic ultra low energy implants by pulsed rf-GD-ToFMS
2011-01-01 Lara, Lobo; Beatriz, Fernandez; Rosario, Pereiro; Nerea, Bordel; Demenev, Evgeny; Giubertoni, Damiano; Bersani, Massimo; Philipp, Hoenicke; Burkhard, Beckhoff; A., Sanz Medel
Development of nano-roughness under SIMS ion sputtering of Germanium surfaces
2011-01-01 Iacob, Erica; Barozzi, Mario; Demenev, Evgeny; Gennaro, Salvatore; Giubertoni, Damiano; Bersani, Massimo
Calibration correction of ultra low energy SIMS profiles based on MEIS analyses for arsenic shallow implants in silicon
2012-01-01 Demenev, Evgeny; Giubertoni, Damiano; J., van den Berg; M., Reading; Bersani, Massimo
Arsenic redistribution after solid phase epitaxial regrowth of shallow pre-amorphized silicon layers
2012-01-01 Demenev, Evgeny; Giubertoni, Damiano; Gennaro, Salvatore; Bersani, Massimo; E., Hourdakis; A. G., Nassiopoulou; M. A., Reading; J. A., van den Berg
Formation of arsenolite crystals at room temperature after very high dose arsenic implantation in silicon
2012-01-01 Meirer, Florian; Giubertoni, Damiano; Demenev, Evgeny; Vanzetti, Lia Emanuela; Gennaro, Salvatore; Fedrizzi, Michele; Pepponi, Giancarlo; A., Mehta; P., Pianetta; G., Steinhauser; V., Vishwanath; M., Foad; Bersani, Massimo
Solid phase epitaxial re-growth of Sn ion implanted germanium thin films
2012-01-01 Giubertoni, Damiano; Demenev, Evgeny; S., Gupta; Jestin, Yoann; Meirer, Florian; Gennaro, Salvatore; Iacob, Erica; Pepponi, Giancarlo; Pucker, Georg; R. M., Gwilliam; C., Jeynes; J. L., Colaux; K. C., Saraswat; Bersani, Massimo
Formation of arsenic rich silicon oxide under plasma immersion ion implantation and laser annealing
2012-01-01 Meirer, Florian; Demenev, Evgeny; Giubertoni, Damiano; Gennaro, Salvatore; Vanzetti, Lia Emanuela; Pepponi, Giancarlo; Bersani, Massimo; M. A., Sahiner; G., Steinhauser; M. A., Foad; J. C., Woicik; A., Mehta; P., Pianetta
Dynamic SIMS Characterization of Ge1-xSnx alloy
2013-01-01 Secchi, Maria; Demenev, Evgeny; Giubertoni, Damiano; Bersani, Massimo
Calibration correction of ultra low energy SIMS profiles based on MEIS analysis of shallow arsenic implants in silicon
2013-01-01 Demenev, Evgeny; Giubertoni, Damiano; M. A., Reading; P., Bailey; T. C. Q., Noakes; Bersani, Massimo; J. A., van den Berg
Development of nano-roughness under SIMS ion sputtering of germanium surfaces
2013-01-01 Iacob, Erica; Demenev, Evgeny; Giubertoni, Damiano; Barozzi, Mario; Gennaro, Salvatore; Bersani, Massimo
Observation of Point defect injection from electrical de-activation of Arsenic ultra-shallow distributions formed by ultra-low energy ion implantation and laser sub-melt annealing
2013-01-01 Demenev, Evgeny; Meirer, Florian; Essa, Z.; Giubertoni, Damiano; Cristiano, F.; Pepponi, Giancarlo; Gennaro, Salvatore; Bersani, Massimo; Foad, M. A.
Evolution of Arsenic nanometric distributions in Silicon under advanced ion implantation and annealing processes
2013-01-01 Demenev, Evgeny; Giubertoni, Damiano
Time-dependent observations of arsenic ultra shallow junctions formed by AsH3 Plasma Immersion Ion Implantation and Deposition in Silicon
2013-01-01 Meirer, Florian; Demenev, Evgeny; Giubertoni, Damiano; Gennaro, Salvatore; Vanzetti, Lia Emanuela; Pepponi, Giancarlo; Steinhauser, G.; Vishwanath, V.; Mehta, A.; Pianetta, P.; Bersani, Massimo; Foad, M.
Dynamic SIMS Characterization of Ge1-xSnx alloy
2013-01-01 Secchi, Maria; Demenev, Evgeny; Giubertoni, Damiano; Bersani, Massimo
Regular nano-void formation on Ge films on Si using Sn ion implantation through silicon nitride caps
2013-01-01 Giubertoni, Damiano; Secchi, Maria; Gupta, S.; Colaux, J. L.; Meirer, Florian; Demenev, Evgeny; Gwilliam, R.; Jeynes, C.; Parisini, A.; Gennaro, Salvatore; Vanzetti, Lia Emanuela; Iacob, Erica; Bersani, Massimo
Dynamic SIMS Application for Characterization of Advanced Doping Schemes in Semiconductors
2013-01-01 Giubertoni, Damiano; Demenev, Evgeny; Meirer, Florian; Bersani, Massimo
Wettability on Ge nano honeycombs created by high fluence ion implantation.
2013-01-01 Secchi, M.; Giubertoni, Damiano; Demenev, Evgeny; Gennaro, S.; Meirer, F.; Iacob, Erica; Lepore, E.; Pugno, N.; Bersani, Massimo
GIXRF characterization of thin Ge1-xSnx films
2014-01-01 Brigidi, Fabio; Secchi, Maria; Demenev, Evgeny; Giubertoni, Damiano; Pepponi, Giancarlo
Grazing incidence x-ray fluorescence modelling of complex surfaces as applied to diffusion barriers for cultural heritage objects
2014-01-01 Brigidi, Fabio; A. E., Marquardt; Demenev, Evgeny; Giubertoni, Damiano; R., Phaneuf; Pepponi, Giancarlo
Development of nano-topography during SIMS characterization of Ge1-xSnx alloy
2014-01-01 Secchi, Maria; Demenev, Evgeny; Giubertoni, Damiano; Iacob, Erica; Bersani, Massimo
| Titolo | Data di pubblicazione | Autore(i) | File |
|---|---|---|---|
| Quantitative depth profiling of boron and arsenic ultra low energy implants by pulsed rf-GD-ToFMS | 1-gen-2011 | Lara, Lobo; Beatriz, Fernandez; Rosario, Pereiro; Nerea, Bordel; Demenev, Evgeny; Giubertoni, Damiano; Bersani, Massimo; Philipp, Hoenicke; Burkhard, Beckhoff; A., Sanz Medel | |
| Development of nano-roughness under SIMS ion sputtering of Germanium surfaces | 1-gen-2011 | Iacob, Erica; Barozzi, Mario; Demenev, Evgeny; Gennaro, Salvatore; Giubertoni, Damiano; Bersani, Massimo | |
| Calibration correction of ultra low energy SIMS profiles based on MEIS analyses for arsenic shallow implants in silicon | 1-gen-2012 | Demenev, Evgeny; Giubertoni, Damiano; J., van den Berg; M., Reading; Bersani, Massimo | |
| Arsenic redistribution after solid phase epitaxial regrowth of shallow pre-amorphized silicon layers | 1-gen-2012 | Demenev, Evgeny; Giubertoni, Damiano; Gennaro, Salvatore; Bersani, Massimo; E., Hourdakis; A. G., Nassiopoulou; M. A., Reading; J. A., van den Berg | |
| Formation of arsenolite crystals at room temperature after very high dose arsenic implantation in silicon | 1-gen-2012 | Meirer, Florian; Giubertoni, Damiano; Demenev, Evgeny; Vanzetti, Lia Emanuela; Gennaro, Salvatore; Fedrizzi, Michele; Pepponi, Giancarlo; A., Mehta; P., Pianetta; G., Steinhauser; V., Vishwanath; M., Foad; Bersani, Massimo | |
| Solid phase epitaxial re-growth of Sn ion implanted germanium thin films | 1-gen-2012 | Giubertoni, Damiano; Demenev, Evgeny; S., Gupta; Jestin, Yoann; Meirer, Florian; Gennaro, Salvatore; Iacob, Erica; Pepponi, Giancarlo; Pucker, Georg; R. M., Gwilliam; C., Jeynes; J. L., Colaux; K. C., Saraswat; Bersani, Massimo | |
| Formation of arsenic rich silicon oxide under plasma immersion ion implantation and laser annealing | 1-gen-2012 | Meirer, Florian; Demenev, Evgeny; Giubertoni, Damiano; Gennaro, Salvatore; Vanzetti, Lia Emanuela; Pepponi, Giancarlo; Bersani, Massimo; M. A., Sahiner; G., Steinhauser; M. A., Foad; J. C., Woicik; A., Mehta; P., Pianetta | |
| Dynamic SIMS Characterization of Ge1-xSnx alloy | 1-gen-2013 | Secchi, Maria; Demenev, Evgeny; Giubertoni, Damiano; Bersani, Massimo | |
| Calibration correction of ultra low energy SIMS profiles based on MEIS analysis of shallow arsenic implants in silicon | 1-gen-2013 | Demenev, Evgeny; Giubertoni, Damiano; M. A., Reading; P., Bailey; T. C. Q., Noakes; Bersani, Massimo; J. A., van den Berg | |
| Development of nano-roughness under SIMS ion sputtering of germanium surfaces | 1-gen-2013 | Iacob, Erica; Demenev, Evgeny; Giubertoni, Damiano; Barozzi, Mario; Gennaro, Salvatore; Bersani, Massimo | |
| Observation of Point defect injection from electrical de-activation of Arsenic ultra-shallow distributions formed by ultra-low energy ion implantation and laser sub-melt annealing | 1-gen-2013 | Demenev, Evgeny; Meirer, Florian; Essa, Z.; Giubertoni, Damiano; Cristiano, F.; Pepponi, Giancarlo; Gennaro, Salvatore; Bersani, Massimo; Foad, M. A. | |
| Evolution of Arsenic nanometric distributions in Silicon under advanced ion implantation and annealing processes | 1-gen-2013 | Demenev, Evgeny; Giubertoni, Damiano | |
| Time-dependent observations of arsenic ultra shallow junctions formed by AsH3 Plasma Immersion Ion Implantation and Deposition in Silicon | 1-gen-2013 | Meirer, Florian; Demenev, Evgeny; Giubertoni, Damiano; Gennaro, Salvatore; Vanzetti, Lia Emanuela; Pepponi, Giancarlo; Steinhauser, G.; Vishwanath, V.; Mehta, A.; Pianetta, P.; Bersani, Massimo; Foad, M. | |
| Dynamic SIMS Characterization of Ge1-xSnx alloy | 1-gen-2013 | Secchi, Maria; Demenev, Evgeny; Giubertoni, Damiano; Bersani, Massimo | |
| Regular nano-void formation on Ge films on Si using Sn ion implantation through silicon nitride caps | 1-gen-2013 | Giubertoni, Damiano; Secchi, Maria; Gupta, S.; Colaux, J. L.; Meirer, Florian; Demenev, Evgeny; Gwilliam, R.; Jeynes, C.; Parisini, A.; Gennaro, Salvatore; Vanzetti, Lia Emanuela; Iacob, Erica; Bersani, Massimo | |
| Dynamic SIMS Application for Characterization of Advanced Doping Schemes in Semiconductors | 1-gen-2013 | Giubertoni, Damiano; Demenev, Evgeny; Meirer, Florian; Bersani, Massimo | |
| Wettability on Ge nano honeycombs created by high fluence ion implantation. | 1-gen-2013 | Secchi, M.; Giubertoni, Damiano; Demenev, Evgeny; Gennaro, S.; Meirer, F.; Iacob, Erica; Lepore, E.; Pugno, N.; Bersani, Massimo | |
| GIXRF characterization of thin Ge1-xSnx films | 1-gen-2014 | Brigidi, Fabio; Secchi, Maria; Demenev, Evgeny; Giubertoni, Damiano; Pepponi, Giancarlo | |
| Grazing incidence x-ray fluorescence modelling of complex surfaces as applied to diffusion barriers for cultural heritage objects | 1-gen-2014 | Brigidi, Fabio; A. E., Marquardt; Demenev, Evgeny; Giubertoni, Damiano; R., Phaneuf; Pepponi, Giancarlo | |
| Development of nano-topography during SIMS characterization of Ge1-xSnx alloy | 1-gen-2014 | Secchi, Maria; Demenev, Evgeny; Giubertoni, Damiano; Iacob, Erica; Bersani, Massimo |
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