Sfoglia per Autore
Anisotropic etching rates in TMAH solutions of different Si crystallographic orientation as a function of film stress
2002-01-01 Guarnieri, Vittorio; Bagolini, Alvise; Giacomozzi, Flavio; Margesin, Benno; Zen, Mario; Decarli, Massimiliano; Ramjay, Pal; Soncini, Giovanni
Cr/Ni/Au multilayer films for high temperature MEMS applications
2002-01-01 Guarnieri, Vittorio; Ramjay, Pal; Bagolini, Alvise; Micheli, Victor; Filippi, Massimiliano; Decarli, Massimiliano; Moscon, Franco; Giacomozzi, Flavio; Margesin, Benno; Soncini, Giovanni; Zen, Mario
Anemometric air flow sensor on Silicon membrane
2003-01-01 Guarnieri, Vittorio; Bagolini, Alvise; Giacomozzi, Flavio; Margesin, Benno; Zen, Mario; Decarli, Massimiliano; Soncini, Giovanni; Alexey, Vasiliev
Fabrication of a piston-type condenser microphone with structured polysilicon diaphragm
2003-01-01 Margesin, Benno; Faes, Alessandro; Giacomozzi, Flavio; Bagolini, Alvise; Zen, Mario
Progettazione, disegno, fabbricazione e caratterizzazione di un microfono capacitivo in silicio con tecnologie MEMS
2003-01-01 Margesin, Benno; Bagolini, Alvise; Faes, Alessandro; Giacomozzi, Flavio; Guarnieri, Vittorio
Micromachined flow sensor on silicon membrane
2003-01-01 Guarnieri, Vittorio; Decarli, Massimiliano; Bagolini, Alvise; Alexey, Vasiliev; Zen, Mario; Soncini, Giovanni
Stress Characterization of Silicon Oxide, Silicon Nitride, Chromium and Gold Films for Micromechanics
2003-01-01 Bagolini, Alvise; Margesin, Benno; Guarnieri, Vittorio; Giacomozzi, Flavio; Faes, Alessandro; R., Pal; Decarli, Massimiliano
Stress characterization of electroplated gold layers for low temperature surface micromachining
2003-01-01 Margesin, Benno; Bagolini, Alvise; Guarnieri, Vittorio; Giacomozzi, Flavio; Faes, Alessandro; Ramjay, Pal; Decarli, Massimiliano
In situ measurement of wood stress during drying process
2003-01-01 O., Allegretti; R., Scanzoni; Bagolini, Alvise; Margesin, Benno
Novel stress test structures for surface micromachining applications
2003-01-01 Bagolini, Alvise; Margesin, Benno; Faes, Alessandro; G., Turco
Stress Characterization of Silicon Oxide, Silicon Nitride, Chromium and Gold Films for Micromechanics
2004-01-01 Bagolini, Alvise; Margesin, Benno; Guarnieri, Vittorio; Giacomozzi, Flavio; Faes, Alessandro; R., Pal; Decarli, Massimiliano
In situ measurement of wood stress during drying process
2004-01-01 O., Allegretti; R., Scanzoni; Bagolini, Alvise; Margesin, Benno
Novel Test structures for stress diagnosis in micromechanics
2004-01-01 Bagolini, Alvise; Margesin, Benno; Faes, Alessandro; G., Turco; Giacomozzi, Flavio
STRESS-STRAIN BEHAVIOUR OF ELECTROPLATED GOLD THIN FILMS
2004-01-01 Bagolini, Alvise; Margesin, Benno; Giacomozzi, Flavio
Development of a MEMS accellerometer for automobile pollution control: an approach.
2005-01-01 R., Mukhiya; Bagolini, Alvise; Margesin, Benno; S., Das; S. K., Lahiri; Zen, Mario; S., Kal
Analytical model for magnified displacement stress test structures.
2005-01-01 Bagolini, Alvise; Faes, Alessandro; Margesin, Benno
A micromachined inertial accelerometer for avionics
2005-01-01 Bagolini, Alvise; Margesin, Benno; Faes, Alessandro; S., Das
<100> bar corner compensation for CMOS compatible anisotropic TMAH etching
2006-01-01 R., Mukhiya; Bagolini, Alvise; Margesin, Benno; Zen, Mario; S., Kal
FEM based design and simulation of bulk-micromachined MEMS accelerometers with low cross axis sensitivity
2006-01-01 R., Mukhiya; Adami, Andrea; Bagolini, Alvise; Zen, Mario; S., Kal
Stress and resistivity analysis of electrodeposited gold films for MEMS application
2006-01-01 S., Kal; Bagolini, Alvise; Margesin, Benno; Zen, Mario
Titolo | Data di pubblicazione | Autore(i) | File |
---|---|---|---|
Anisotropic etching rates in TMAH solutions of different Si crystallographic orientation as a function of film stress | 1-gen-2002 | Guarnieri, Vittorio; Bagolini, Alvise; Giacomozzi, Flavio; Margesin, Benno; Zen, Mario; Decarli, Massimiliano; Ramjay, Pal; Soncini, Giovanni | |
Cr/Ni/Au multilayer films for high temperature MEMS applications | 1-gen-2002 | Guarnieri, Vittorio; Ramjay, Pal; Bagolini, Alvise; Micheli, Victor; Filippi, Massimiliano; Decarli, Massimiliano; Moscon, Franco; Giacomozzi, Flavio; Margesin, Benno; Soncini, Giovanni; Zen, Mario | |
Anemometric air flow sensor on Silicon membrane | 1-gen-2003 | Guarnieri, Vittorio; Bagolini, Alvise; Giacomozzi, Flavio; Margesin, Benno; Zen, Mario; Decarli, Massimiliano; Soncini, Giovanni; Alexey, Vasiliev | |
Fabrication of a piston-type condenser microphone with structured polysilicon diaphragm | 1-gen-2003 | Margesin, Benno; Faes, Alessandro; Giacomozzi, Flavio; Bagolini, Alvise; Zen, Mario | |
Progettazione, disegno, fabbricazione e caratterizzazione di un microfono capacitivo in silicio con tecnologie MEMS | 1-gen-2003 | Margesin, Benno; Bagolini, Alvise; Faes, Alessandro; Giacomozzi, Flavio; Guarnieri, Vittorio | |
Micromachined flow sensor on silicon membrane | 1-gen-2003 | Guarnieri, Vittorio; Decarli, Massimiliano; Bagolini, Alvise; Alexey, Vasiliev; Zen, Mario; Soncini, Giovanni | |
Stress Characterization of Silicon Oxide, Silicon Nitride, Chromium and Gold Films for Micromechanics | 1-gen-2003 | Bagolini, Alvise; Margesin, Benno; Guarnieri, Vittorio; Giacomozzi, Flavio; Faes, Alessandro; R., Pal; Decarli, Massimiliano | |
Stress characterization of electroplated gold layers for low temperature surface micromachining | 1-gen-2003 | Margesin, Benno; Bagolini, Alvise; Guarnieri, Vittorio; Giacomozzi, Flavio; Faes, Alessandro; Ramjay, Pal; Decarli, Massimiliano | |
In situ measurement of wood stress during drying process | 1-gen-2003 | O., Allegretti; R., Scanzoni; Bagolini, Alvise; Margesin, Benno | |
Novel stress test structures for surface micromachining applications | 1-gen-2003 | Bagolini, Alvise; Margesin, Benno; Faes, Alessandro; G., Turco | |
Stress Characterization of Silicon Oxide, Silicon Nitride, Chromium and Gold Films for Micromechanics | 1-gen-2004 | Bagolini, Alvise; Margesin, Benno; Guarnieri, Vittorio; Giacomozzi, Flavio; Faes, Alessandro; R., Pal; Decarli, Massimiliano | |
In situ measurement of wood stress during drying process | 1-gen-2004 | O., Allegretti; R., Scanzoni; Bagolini, Alvise; Margesin, Benno | |
Novel Test structures for stress diagnosis in micromechanics | 1-gen-2004 | Bagolini, Alvise; Margesin, Benno; Faes, Alessandro; G., Turco; Giacomozzi, Flavio | |
STRESS-STRAIN BEHAVIOUR OF ELECTROPLATED GOLD THIN FILMS | 1-gen-2004 | Bagolini, Alvise; Margesin, Benno; Giacomozzi, Flavio | |
Development of a MEMS accellerometer for automobile pollution control: an approach. | 1-gen-2005 | R., Mukhiya; Bagolini, Alvise; Margesin, Benno; S., Das; S. K., Lahiri; Zen, Mario; S., Kal | |
Analytical model for magnified displacement stress test structures. | 1-gen-2005 | Bagolini, Alvise; Faes, Alessandro; Margesin, Benno | |
A micromachined inertial accelerometer for avionics | 1-gen-2005 | Bagolini, Alvise; Margesin, Benno; Faes, Alessandro; S., Das | |
<100> bar corner compensation for CMOS compatible anisotropic TMAH etching | 1-gen-2006 | R., Mukhiya; Bagolini, Alvise; Margesin, Benno; Zen, Mario; S., Kal | |
FEM based design and simulation of bulk-micromachined MEMS accelerometers with low cross axis sensitivity | 1-gen-2006 | R., Mukhiya; Adami, Andrea; Bagolini, Alvise; Zen, Mario; S., Kal | |
Stress and resistivity analysis of electrodeposited gold films for MEMS application | 1-gen-2006 | S., Kal; Bagolini, Alvise; Margesin, Benno; Zen, Mario |
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